Jonas Flueckiger, Shon Schmidt, Valentina Donzella, Ahmed Sherwali, Daniel M Ratner, Lukas Chrostowski, Karen C Cheung
Optics Express, Vol. 24, Issue 14, 15672-15686.
While silicon photonic resonant cavities have been widely investigated for
biosensing applications, enhancing their sensitivity and detection limit continues to be an
area of active research. Here, we describe how to engineer the effective refractive index and
mode profile of a silicon-on-insulator (SOI) waveguide using sub-wavelength gratings
(SWG) and report on its observed performance as a biosensor. We designed a 30 μm
diameter SWG ring resonator and fabricated it using Ebeam lithography.